摘要
真空蒸发醋酸锌和氯化铝，在加热的玻璃基片上制备出铝掺杂的氧化锌透明导电薄膜。研究了薄膜的结构和电导率随掺杂功率的变化以及真空退火处理对薄膜电导率的影响。
luminium-doped zinc oxide films are prepared by thermal evaporating zinc acetate and aluminium chloride onto heated glass substrates. Structure and electrical properties of the deposited films are investigated. The lowest resistivity of the deposited AZO films is about 1. 8×10-3 Ωcm. Doping with aluminium increases the electrical conductivity of the deposited films by six orders of magnitude.
出处
《太阳能学报》
EI
CAS
CSCD
北大核心
1995年第2期216-219,共4页
Acta Energiae Solaris Sinica
关键词
AZO薄膜
氧化锌
真空蒸发
氯化铝
电导率
ZO film. vacuum evaporation. aluminium chloride.electrical conductivity
