相对测量法在高精度比长中的应用

A STUDY ON THE APPLICATION OF COMPARING METHOD IN HIGH PRECISION DIMENSIONAL MEASUREMENT

提出了在高精度比长中采用相对测量可免除对测量条件苛刻要求的新方法，并用于所研制的激光干涉比较测量仪，验证了在一般计量室的条件下对１００ｍｍ玻璃短标尺的检定，检定精度在±０．５μｍ范围内．

n this paper, a new dimensional measuring method is presented which is of higher accuracy and lower requirement to the measuring environment. Based on this conception, a special-purpose laser interferometer system was developed. The results of experiments show that the maximum verifying error of a 100mm glass scale measured by this system is less than±0. 5μm in the environment of a shop inspection room.