数值CV方法的唯一性问题

The Uniqueness of Numerical Simulation for CV Data

本文给出了根据ＣＶ数据用数值方法反求杂质浓度的基本算法，并研究了此算法所遇到的不收敛和不确定问题。结果表明．数值ＣＶ方法收敛的本质原因是此方法的唯一性问题。

The basic algorithm for the dopant profiling used the numerical simulation based on CV data was given in this paper,and the uncertainty and non-convergence of this algorithm were rcsearcbecd in detail.The research results indicated that the uncertainty and nonconvcrgence of numerical CV profiling is not caused by the mathematical aspect of the numfrical simulation but by the nonunique nature of the technique.