脉宽调制器可靠性评估电路的设计与应用

A Test Chip for Evaluating the Reliability of Pulse -Width-Modulator IC’s

本文介绍一种评价脉宽调制器可靠性和工艺控制水平的评估电路设计。它是针对Ｘ１５２５脉宽调制器的小批量试制和贯标而设计的。通过微电子测试图形对工艺的控制检测，和单机理失效的评估来对Ｘ１５２５的可靠性进行评价。该电路也适用于一般的双极ＩＣ的可靠性评估。文章给出了多种微电子测试图形及单机理评估电路和单元评估电路。

A test chip used to evaluate the reliability of pulse-width-modulator IC’s as well as their fabrication process is described in the paper.The evaluation circuit is specifically designed and manufactured for X1525,a PWM IC,and it can also be used for evaluating reliability of othertypes of bipolar IC’s.Various kinds of microelectronic test patterns,units for evaluating single failure mode and macro circuits are introduce.