摘要
近年来，电铸在微细加工中的应用得到了较快发展，尤其在近几年高速发展的ＬＩＧＡ技术的掩模加工和其应用产品中，该技术充分体现出了它的优越性能和潜在的应用前景。本文结合ＬＩＧＡ技术掩模的加工及其电铸产品，用已取得的实验结果来说明电铸的应用潜力。
In recent yaers,the electrodeposition technique has been developed rapidlyand have a good future of application in the microstruture fabrication, especiallyin the fabrication of LIGA mask and its final products,In this paper,some metalstructures with nickel and goldmaterial made by electrodeposition in resist struc-ture are showed.
出处
《微细加工技术》
1995年第3期49-52,共4页
Microfabrication Technology
关键词
微细加工
LIGA技术
电铸
掩模
microfabrication
LIGA technique
electrodeposition
