Sol－Gel法合成K（Ta，Nb）O_3材料

Synthesis of K(Ta, Nb)O_3 Material by Sol-Gel Method

以金属醇盐乙酸钾［Ｋ（ＯＣ２Ｈ５）］，乙醇铌［Ｎｂ（ＯＣ２Ｈ５）５］和乙醇钽［Ｔａ（ＯＣ２Ｈ５）５］为原料，用Ｓｏｌ－Ｇｅｌ法合成了Ｋ（Ｔａ，Ｎｂ）Ｏ３超细粉末和薄膜，研究了工艺参数如前驱体溶液浓度、热处理温度等因素对材料结构及物性的影响．粉料的粒径为２０～４０ｎｍ，所需合成温度约为７００℃，比通过传统的固相反应制备同种材料的合成温度低近１００℃；以ＳｒＴｉＯ３（１００）单晶作基片，采用匀胶法获得了沿（１００）高取向生长的Ｋ（Ｔａ０．６５Ｎｂ０．３５）Ｏ３薄膜，薄膜表面均匀、致密，室温时呈立方相晶格结构．研究表明，选择物理性质相似、晶格常数相匹配的材料作基片，适当控制工艺参数，尤其是前驱体溶液的浓度、升降温速度及烧结温度是获得优质薄膜的关键．

K(Ta, Nb)O3 fine powder and thin films were synthesized by Sol-Gel method, using metal alkoxides as raw materials, the influences of the process parameters on the structute and properties of the material were studied. The size of the powder was 20～40nm, the synthesis temperature was approximately 700℃, lower than that of the same material fabricated by conventional solid phase reaction method(800℃).(100) highly oriented KTa0.65Nb0.35O3 thin film was successfully fabricated on SrTiO3(100) single crystal substrate, the surface of the thin film was smooth, homogeneous, crack-free, and dense. The results showed that the concentration of the precursor solution had great effect on the structure of the thin film.