化学气相淀积制备Si_3N_4超细粉末

Production of Si_3N_4 Ultrafine Powders by Chemical Vapor Deposition

本文研究了ＳｉＣｌ４－ＮＨ３－Ｎ２－Ｈ２系统平衡热力学，确定了Ｓｉ３Ｎ４合成的最佳热力学条件．采用电阻炉化学气相淀积法制备了Ｓｉ３Ｎ４超细粉末，并考察了工艺条件对颗粒形貌的影响．

The system of SiCl4-NH3-N2-H2, which was used to synthesize Si3N4 ultrafine powders, was analyzed thermodynamically, and the conditions to prepare Si3N4 powders were evaluated. Si3N4 ultrafine powders were synthesised by chemical vapor deposition method in an electronic furnace reactor. The influence of processing parameters on properties of products was studied.