直流等离子体CVD金刚石膜的阴极发光性质的研究

Cathodeluminescence Study of Diamond Films by DC Plasma CVD

本文研究了直流等离子体ＣＶＤ金刚石膜在常温和液氮温度下的阴极发光光谱，探讨了阴极发光谱中各峰的起因，并分析了光谱随测量温度和沉积条件的变化情况，讨论了造成这种变化的原因．研究表明，金刚石膜中缺陷和杂质以及金刚石膜的晶体结构对它的阴极发光光谱有重要的影响．

In this paper, the cathodeluminescence spectra at 300K and 80K, of diamond films prepared by DC plasma CVD under different growth conditions were studied. The variations of the spectra with changing deposition conditions, measurement temperature and the origin of every peak of spectra were discussed.Experimental results show the impurities, defects and crystalline structure of the films have an important effect on the cathodeluninescence spectra.