亚波长刻槽结构衍射场研究与数值计算

ANALYSIS AND NUMERICAL CALCULATIONSOF THE DIFFRACTION FIELDS BY FINITEGROOVES WITH SUBWAVELENG-THED STRUCTURES

用耦合波理论分析考虑了亚波长刻槽结构有限刻槽光栅对光波场的衍射作用,给出了TE偏振以及TM偏振入射下的耦合波方程,并通过数值计算给出了单槽及多槽在TE偏振正入射下的衍射场分布.

Based on the rigorous coupled-wave theory, the optical diffractive effect by a finite groove grating with subwavelengthed structure is considered. By theoretical analysis the coupled-wave equations for the incident light with TE and TM polarizations are derived, and by numerical calculations the diffraction field distributions of single and finite grooves are given under the normal incidence TE polarization.