相移干涉术中压电陶瓷的驱动电路

Driving electric circuits for the Piezoelectric ceramics in the Phase-shifed inierferometry

在相移干涉测试技术中通常都采用压电陶瓷元件作为相移元件；本文介绍了两种压电陶瓷元件驱动电路的工作原理并对两种方案进行了比较．

The piezoelectric ceramics are commonly uSed as the phase-shifted elements in thePhase-shifted interferometry. Two driving electric circuits for the piezoelectric ceramicsare introduced and the characteristics of the electric circuits are comaaed in this poper.