梯度功能压电陶瓷执行器的制备及其微位移特性

PREPARATION AND MICRO-DISPLACEMENT CHARACTERISTICS OF PIEZOELECTRICCERAMEC ACTUATON WITH FGM

研究了ｘＰｂ（Ｎｉ＿（１／３）Ｎｂ＿（２／３））Ｏ＿３－（１－ｘ）Ｐｂ（Ｚｒ＿δＴｉ（１－δ））Ｏ＿３（０．２≤ｘ≤０．６，０．２≤δ≤０．５）三元系固溶体的介电和压电性能．采用粉末冶金法制备了Ｐｂ（Ｎｉ＿（１／３）Ｎｂ＿（２／３））Ｏ＿（３－）ＰｂＺｒＯ＿３－ＰｂＴｉＯ＿３（ＰＮＮ－ＰＺ－ＰＩ）系梯度压电功能材料（ＦＧＭ），研制了一种新型的ＦＧＭ压陶瓷执行器，它有三层材料构成：压电陶瓷层，中间夹层（组分梯度变化）和高介电层，其弯曲位移特性的研究结果表明在工作电压为１０００Ｖ时，室温执行器自由端的弯曲位移约为２０μｍ（执行器的尺为ｌ×ｗ×ｔ：２０×８×０．７ｍｍ３）．利用ＳＥＭ和ＥＤＡＸ分析手段，对执行器横断面的结晶形貌及组分分布进行了研究。

The didectric and piezoelectric properties of the Pb(Ni_(1/3)Nb_(2/3))O_3-PbZrO_3-PbTiO_3(PNN-PZ-PT)ternary solid solutions were systematically investigated. The laminatedpiezoelectric ceramic plates consisting of functionally gradient materials(FGMs)in the sameterary system have been obtained by powder metallurgical process. A new kind of FGMpiezoelectric ceramic actuator has been developed, which consists of three layers :a piezoelec-tric ceramic layer, a middle layer whose composition changes gradually, and another ceramiclayer with high dielectric constant. The size of the FGM actuator(l×w×t)is 20×8×0. 7mm3 . The microdisplacement chatacteristics of the FGM actuator have been measured. The results showed that the bending displacement at the free end of the FGM actuator wasabout 20μm when applied 1000 Voltage, Furthermore , the morphology and the composition-al distribution of the FGM actuator across the profile of the FGM actuator were analysed bySEM and EDAX respectively.