摘要
求出了平面工艺所得圆柱边界的突变结的电位分布的解析解.它由若干项拉普拉斯方程的解和一项泊松方程的解组成.此解不象通常的圆柱对称解:在圆柱与平面的交界部分不存在不匹配.计算了击穿电压,其值略高于过去常用平面结击穿电压值,且用一个简单表示式表示.
An analytical solution for the potential profile of an abrupt cylindrical junction has beenobtained by using several terms of the solutions of Laplace's equation added to the solution ofPoisson's equation.This solution,unlike the common cylindric-symmetrical solution, introducesno mismatch at the boundary between the cylindrical region and the plane region.Breakdownvoltage has been computed,showing a value slightly higher than the previous result,and presen-ted in a simple analytical form.
关键词
平面结
击穿电压
电场分布
Planar p-n junction
Breakdown voltage Poisson's equation
Field profile
