摘要
激光双焦干涉球面微观轮廓仅是一种高灵敏度的表面粗糙度测量仪器。本文描述了利用激光双焦透镜偏振共路干涉系统及计算机自动控制系统对各种球面进行实时扫描、采样及数据处理的新技术、新仪器。实测表明该仪器的纵向分辨率小于1nm，横向分辨率小于2μm。
The Laser double focus interference spherical Profilometer is a new-type measuring instrument of high sensitivi-ty for roughness of surface. This paper describes the new technigue and instrumentation for measaring spheres of different radius by real-time scanning,sampling and data processing,using the system of double focus lenses polarization common-path interfer-ence and computerized antomatic control. The instrument has a height sensitivity of better than 1nm and a lateral sen sitivity of better than 2μm.
出处
《现代科学仪器》
1995年第4期36-48,40,共14页
Modern Scientific Instruments
关键词
双焦透镜
共路干涉
轮廓仪
double focuslens,common path interference,profilometer
