硅材料生产中污水的处理及综合利用

Production the Material of Silicon its Dirty WaterDipossal and Synthecic Application

本文处理的是高含Ｃｒ￣＋６、ＨＦ及ＮＯ＿３￣－等有毒、腐蚀性强的污水。采用把多晶硅和单晶硅腐蚀废液分别收集单独进行处。这样废液体积小，浓度大便于处理回收，污水处理后有害物质含量远优于国家标准，而且所用设备简单，原料便之易得。

his paper primarily deals with corrosive dirty water of poisonous n1ateri。als highly contained with Gr+’,HF and NO*If the corrosive of polycrystalline silicon andmonocrystalline silicon is collected respectively and dispossed single一handed.There willbe a smaller volumn of waste liquid and higher consistency。Which helps disposing and re-covering。The content of poisonous materials is more superior to that of the national stan-dard after the disposal of dirty water。What’s more,the equipment needed is simpler andthe raw materials is easy to get。