摘要
评述了高质量人造石英晶体生产的动态以及晶体中的缺陷,如籽晶罩、包裹体、位错、腐蚀隧道及杂质等。电清洗技术能有效地排除杂质和减少腐蚀隧道密度。简要介绍了人造石英晶体的应用。
The production condition of synthetic quartz crystal with high quality as well as the defects in quartz crystal,such as seed veil,inclusions,dislocations and etch tunnels,impurities are reviewed in this paper.Electrodiffusion(sweeping)process can effectively eliminate the inpurities and reduce the density of etch tunnels, The applications of quartz crystal are presented concisely at last.
出处
《压电与声光》
CSCD
北大核心
1995年第4期43-51,共9页
Piezoelectrics & Acoustooptics
关键词
石英晶体
缺陷
包裹体
位错
杂质
生产
artificial quartz crystal
defect
inclusion
dislocation
impurity