制作工序对声表面波延迟线延迟时间的影响

The Effects of Fabrication Process on Delay Time of SAW Delay Line

分析了声表面波器件制作工序对器件延迟时间的影响，并进一步试验了光刻工序对器件延迟时间的影响。

The effects of fabrication process for SAW delay line device on delay time is ana-lyzed, and the influence of photoetching process on delay time is observed experimentally.