摘要
介绍测量精度为±０．００３ｍｍ的ＣＣＤ尺寸检测系统的光学系统设计特点及远心物镜设计原理，并给出了测试结果。
The optical system design property and acentric objective design principle of a CCD size checking system with a measuring accuracy of to. 003urn are described and the testing results are given.
出处
《应用光学》
CAS
CSCD
1995年第1期9-12,共4页
Journal of Applied Optics
关键词
尺寸测量
CCD
远心物镜
光学系统
size measuring, linear array CCD, acentric objective, optical system
