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α-Fe_(2)O_(3)/SnO_(2)气敏薄膜的结构与性质 被引量:5

Preparation and Property of α-Fe_(2)O_(3)/SnO_(2) Gas-sensing Film
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摘要 α-Fe_2O_3/SnO_2气敏薄膜的结构与性质娄向东,杨秀清,李靖华,沈荷生,沈瑜生(河南师范大学化学系新乡453002)(中国科学技术大学材料科学与工程系合肥)关键词α-Fe_2O_3,SnO_2,双层膜,气敏性能α-Fe_2O_3具有刚玉结构... The bilayer film consistetl ofα-Fe_2O_3 and SnO_2 was prepared by the sputteringmethod. The film showed a better sensitivity and selectivity than the individual layer alone.The effects of heat treatment conditions and thickness of the α-Fe_2O_3 layer on the gas-sensingproperty of the product have been studied.
出处 《应用化学》 CAS CSCD 北大核心 1995年第1期77-79,共3页 Chinese Journal of Applied Chemistry
基金 国家自然科学基金资助项目。
关键词 α-Fe_(2)O_(3)/SnO_(2) 双层膜 气敏性能 α-Fe_(2)O_(3)/SnO_(2) bilayer film gassensing property
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