摘要
本文研究了制备纳米硅粉的工艺参数：获得了最佳工艺参数：激光功率密反１６００Ｗ／ｃｍ２，硅烷浓度１０％，高纯氩稀释，反应气体流量１００ｃｍ３／ｓ，反应池压力２６．７ｋＰａ。改变工艺参数可制备不同粒度的纳米硅粉。
It has been studied that how the preparation techniques affect the characteristics of nanosized silicon powders synthesized by laser-induced chemical vapor deposition. The optimum preparation conditions are as follows. The power density of CO2 Laser is 1600W/cm2. The concentration of silane is 10 Vol.%. The dilution gas is argon of high purity. The flow rate of reactive gases is 100cm3/s. And the pressure of reaction cell is 26. 7kpa
出处
《应用激光》
CSCD
北大核心
1995年第1期8-13,共6页
Applied Laser
基金
广东省高教局重点学科和广东省基金
