伺服图形预刻机亚微米光斑曝光技术

The Explosure Technique or a Sub-micron Spot at a Servopattern Pre-photoetching Device

本文讨论利用激光器产生亚微米光斑、在涂有光刻胶的磁盘上曝光的有关技术．给出了伺服图形预（光）刻机的系统结构、光路及刻录头设计，提出了伺服图形微斑记录曝光模型．

The paper mainly describes the related techniques that are to produce a sub-micron spot by laser and to explosure on a disk coated with photoresist. It has given the abbreviate structure of the servo-pattern pre-photoetching device,light path and the recording head. And it has proposed the explosure model for the servo-pattern pre-photoetching device.