摘要
本文结合设计开发的磁盘预光刻伺服录写装置，详细分析了刻录头聚焦检测光路，建立并研究了检测信号模型，指出可通过适当选取参数，获得较大范围的检测距离。
Focus detecting is an important issue for cutting machine. Based on the magneticdisk pre-lithography servo writer, the paper designs and analyses the optical layout of focus detecting, builds and studies,the model of detecting signal, points out that it can get larger detecting distance by getting appropriate parameters.'
出处
《应用激光》
CSCD
北大核心
1995年第5期227-229,共3页
Applied Laser
关键词
聚焦检测
光路分析
刻录机
磁盘
光刻
focus detect, optical layout analysis, Cutting machine
