摘要
文[1]的结论是错误的。微小物体最小可测尺寸仅由标量理论的成立范围决定,在标量理论允许的范围内,只要正确地应用实验装置和测量公式,便能得到准确的测量结果,测量的正确度与物体的尺寸和衍射角的大小无关。
We think the conclusion of the paper [1] is wrong. We point out that the minimum measureable dimension is only dependent on the scope of application of the scalar theory.Within the limits permitted by the scalar theory, provided that the experimental provision and the measurement formula are correctly applied, an accurate result for the measurement can be obtained. The measurement correctness is independent of the dimension of a small object and the size of the diffraction angle.
出处
《应用激光》
CSCD
北大核心
1995年第6期274-276,共3页
Applied Laser
关键词
衍射
夫朗和费近似
测量
光学测量
diffraction, fraunhofer approximation, measurement, correctness.