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不规则拐角电阻计算的保角映射方法 被引量:4

THE CONFORMAL MAPPING METHOD FOR IRREGULAR CORNER RESISTANCES CALCULATIONS
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摘要 该文根据保角映射原理,对两端宽度不等的拐角电阻和宽度突变型薄膜电阻等效方数进行了计算,并给出了它们的拟合函数形式。对这两类不规则薄膜电阻等效方数的计算与实验结果进行了比较,其结果令人满意。 Based on conformal mapping,the following relations are deduced inthispaper.1.The relation between the number of colner squares ofthethin film resis-tances andthe ratio of widthbeside the corners;2.The relationbetween the equi一valent number of squares of tape resistances whose width can change suddenly andtheratio of the widthatits two sides.The calculations agree withthe experimentalresultssatisfactorily.
作者 郝跃 曹文清
出处 《应用科学学报》 CAS CSCD 1995年第3期333-338,共6页 Journal of Applied Sciences
关键词 集成电路 薄膜电阻 不规则电阻 电阻 保角映射 integrated circuits,thinfilm resistance,numericalcalculation.
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参考文献2

  • 1孙景李,经典电动力学,1987年
  • 2钟玉泉,复变函数论,1979年

同被引文献27

  • 1Jaime Ramirez-Angulo, Ruiting Wang and Randall L. Geiger. Improvement of Laser Trimmed Film Resistor Stability by Selection of Optimal Trim Paths[J]. IEEE International Symposium on Circuits and Systems,1991,4(11-14):2188~2191.
  • 2Hiroshi Yoshimura, Kazuo Tansho, et.al. An Algorithm for Resistance Calculation from IC Mask Pattern Information[J]. IEEE International Symposium on Circuits and Systems,1979:478-481.
  • 3Alan Cable. Technology Review of high-speed, thick film laser trimming[J]. SPIE, 1986,611:2-7.
  • 4Jaime Ramirez, et al. Characterization, Evaluation and Comparison of Laser-Trimmed Film Resistors[J]. IEEE Journal of Solid-State Circuits.1987,22(6):1177-1189.
  • 5Takashi Mitsuhashi & Kenji Yoshoda. A Resistance Calculation Algorithm and Its Application to Circuit Extraction[J]. IEEE Transactions on Computer-aided Design,1987,6(3):337-345.
  • 6Mark Horowitz, Robert W. Dutton. Resistance Extraction from Mask Layout Data[J]. IEEE Transactions on Computer-Aided Design,1983,2(3):145-150.
  • 7梁百先 汤建国.电磁学教程[M].北京:高等教育出版社,1983.197.
  • 8卜寿彭.固定电阻器[M].北京:电子工业出版社,1982.124-127.
  • 9Jaime Ramirez,et al.Characterization,Evaluation and Comparison of Laser-Trimmed Film Resistors[J].IEEE Journal of Solid-State Circuits,1987,22(6):1177-1189.
  • 10Alan Cable.Technology Review of high-speed,thick film laser trimming[J].SPIE,1986,611:2~7.

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