氦氖激光拍波绝对干涉测长技术现状

The status of absolute distance interferometry using He-Ne laser beat-waves

近２０年来，国内外众多学者一直在潜心研究大长度绝对干涉测量技术，并先后研制出以二氧化碳、氦氙和氦氖激光器为光源的若干测量系统，但至今尚未进入实用阶段，介绍了几种用氦氖激光器作光源的拍波绝对干涉侧长系统，对其优缺点进行了详细分析，并指出了该技术实用化过程中的几个关键问题，以便早日研制成功实用的大长度绝对干涉测量仪，从而满足科研和工业生产的需要。

Abstract In recent two decades，many scholars at home and abroad have always investigated the technique of absolute distance interferometry，and have already de-veloped a series of systems in which different kinds of lasers ，such as CO_2，He—Xe， He—Ne etc，were used as light sources．Unfortunately，no system has been put into practical use up to date. Here are several measuring systems whose light sources are He—Ne lasers，and both advantages and disadvantages are analysed in detail．respectively．Also，some important problems which are related to the prac- ticality of the technique are emphasized especially in order to develop an absolute distance interferometric instruments as early as possible，then we can meet the needs of scientific research as well as industrial production.Subject terms He—Ne laser，Peat—wave，Absolute distance interferometry