摘要
本文运用气体放电理论，对双层辉光离子渗金属工艺条件下，气体的电离度，离子轰击能量及密度、辉光放电功率耗散等方面的一些问题进行了分析与计算。
AbstractIn this paper.a series of problems relating to the glow discharge under the working condition of Xu-TEC process are discussed,those including the ionizing ratio of the gas,the energy and density of ion bombardment on the Surface of cathode and the power dissipation in the discharge etc,some analyses and calculations are also made on the basis of discharge theory
出处
《真空》
CAS
北大核心
1995年第1期29-35,共7页
Vacuum
