摘要
多弧离子镇生产的ＴｉＮ装饰膜表面含有一定数目的颗粒。严重影响着膜层色泽、光洁度、孔隙度及耐腐性、实验表明：“二次辉光”的改进工艺，可以有效地减少表面颗粒数目，改善膜层质量。
Abstract In this paaper macroparticles on TiN decorative films prepared by the multi-arc ion plating proCess were studied,the influence of macroparticle on colour,surface roughness,porosity and corroSion resistance have been revealed.The results show that the second glow discharge process not Only decreases number of macroparticles but also improves quality of the film
出处
《真空》
CAS
北大核心
1995年第1期20-24,共5页
Vacuum
