摘要
本文介绍恒压式微流量计的设计原理和参数的选择方法，并给出了误差分析与实验结果．流量测量范围为３．４９～１．９７×１０５Ｐａ１／ｓ，不确定度≤２．２５％。该微流量计已用于动态流量法校准系统和低温泵的抽速测量之中。
Abstract In this paper,it is introduced that the design principle and selection rules of the parameters of the constant pressure low-range flowmeter. The results of error analysis and experiment are given.The measurement range iS 3. 49￣ 1. 97×10 5P L/s,and the uncertainty is≤2. 25%.The flowmeter has been put to use in the dynamic flow method system for calibration and the cryopump speed measurement
出处
《真空》
CAS
北大核心
1995年第1期9-14,共6页
Vacuum
