扩散泵微量返油实验装置的研究

Study on Experimental Set-up of Micro-oil Back-streaming of Diffusion Pump

本文提出了应用石英晶体谐振天平技术测量返油率的新方法。通过理论分析和试验研究，证明这种方法可以推广应用。返油率在１０－３～１０－４ｍｇ／ｃｍ２·ｍｉｎ量级上进行了实际测量，取得了满意的效果。

AbstractIn this paper,we put forward a new method of applying the technology of quartz-crystal microbalance to the measurment of oil back-streaming of diffusion pump.With analysing the technology in theory and studying experiments,It is proved that it is extensively used.We measured theoil back-streaming of diffusion pump between 10-3 and 10-4 mg/cm2.min and obtained satisfyingresult.