两种螺旋通道结构牵引分子泵的性能比较

Two Kinds of Helical Channel Construction and Performance of Drag Molecular Pump

这篇文章主要介绍了计算两种牵引分子泵抽气特性的理论模型。利用模型可以模拟牵引分子泵在过渡流和滑流工作条件下的抽气性能。

Abstract In this paper,two theoretical models of drag molecular pump are compared,which can simulate the pumping performances of drag molecular pump on transition and higher pressure regime flows.