大面积ACPDP保护膜的制备及其特性之研究

Study of the Manufacturing Technology and its Characterization for Large Area ACPDP Protection Film

本文讨论了制取均匀、致密、清洁ＭｇＯ保护膜的途径及不同工艺对膜和ＡＣＰＤＰ特性之影响。

The technology manufacturing the uniform, compact and clean protection MgO film and the effects of influencing the film and ACPDP characteristics are discussed in this paper.