摘要
用数值计算方法研究多道探测XPS的半球形能量分析器的性质，得到边缘场的电位分布和电子轨迹。作为计算模型的EA－11型分析器，被证明适合于多道探测的应用。
The characteristics of hemispherical energy analyser, which will be improved for multichannel detection of XPS are studied. The potential distribution in fringing field and electron trajectories are calculated with numerical methods. The EA-11 hemispherical analyser, which we take as a calculation model, is proved to be suitable for the application of multichannel detection.
出处
《真空科学与技术》
CSCD
1995年第1期53-58,共6页
Vacuum Science and Technology
关键词
电子轨迹
半球形能量分析器
X光电子谱
多道探测
Electron trajectory, Hemispherical energy analyser,XPS, Multichannel detection
