摘要
介绍一种频率稳定度优于0．3Hz的石英晶体微量天平，在微量天平的电路中采用了高稳定度（5×10-9／d）的时基振荡器，探头采用热丝或半导体致冷器件恒温结构，频率稳定度优于0．3Hz。用此天平成功地测量了三元盐氧化物阴极和钪酸盐阴极的蒸发率，并对真空镀铝膜厚度进行了精确监控。
This paper presents a quartz crystal microbalance (QCM) which frequency stability is better than 0. 3Hz. High stability time base oscillator (5×10-9/day) has been used in the QCM. The probes are characterized by thermostatic structures with heater or semiconductor refrigeration device. The evaporation rates for (Ba, Sr, Ca) O cathodes and scandate cathodes were measured successfully and thin film thickness for aluminum were monitored accurately by this QCM.
出处
《真空科学与技术》
CSCD
1995年第2期97-102,共6页
Vacuum Science and Technology
