电子束、离子束与蓝宝石相互作用的研究

A STUDY OF THE INTERACTION BETWEEN ELECTRON BEAM, ION BEAM AND SAPPHIRE

研究了电子束、离子束作用于Al2O3表面时成分的变化，表明无论电子束或离子束都能使Al2O3发生分解，产生导电的元素Al。实验在PHI610·SAM上进行，电子束轰击下（3keV，O．5μA，入射角60°）10s就有元素Al分解出来，2min以后就达到饱和，分解析出量随时间成a（1－e－bt）的关系。离子束轰击下同样发生元素Al的分解，但当Ei＞3keV时，由于剥离速率加大，溅射5min时表面Al峰反而比1min时要弱。这时表面Al含量处于分解析出与溅射剥离的动态平衡中。实验还发现了Al2O3的解析与表面成分有关（如碳的含量）。最后讨论电子束与离子束的解析机理。

In this study the decomposition dynamic process of Al2O3 under electron and ion bombardment has been investigated. Experimental result shows that under only 10 s long electron bombardment(3 keV, 0. 5 μA, incident angle 60°), elemental aluminum from decomposition of Al2O3 can be observed,after 2 min the Al2O3 decomposition reaches maximum,the dependence of the quantity of elemental Al with time behaves as a(1-e-bt). During ion bombardment decomposition of Al2O3 takes place and the decomposition of Al2O3 in- creases with the bombardment time. However,when Ei>3 keV the intensity of aluminum peak after 5 min sputtering, to the contrary,is less than the 1 min peak, that is because here the surface composition is in dy- namic equilibrium between Al creation from decomposition and the sputtering.