摘要
用对向靶溅射制备NiCr－NiSi薄膜热电偶，实现了薄膜成分与靶材基本一致。对热电偶进行动态特性测试表明，薄膜热电偶的时间常数τ随膜厚变薄而减小，并对此进行讨论。
In this paper,NiCr-NiSi thin film thermocouples prepared by facing targets sputtering were presented. By this method,little deviation of composition between film and target was achieved. The measurements of dynamic characteristic of the thermocouple show that the time-constant τ of the thermocouple increases as a function of the film thickness. This experimental result was discussed in the paper.
出处
《真空科学与技术》
CSCD
1995年第5期317-320,共4页
Vacuum Science and Technology
关键词
对向靶溅射
薄膜热电偶
时间常数
Facing targets sputtering,Thin film thermocouple,Time-constant
