摘要
一般认为，用作真空残气分析的四极质谱计是很难进行定量分析的。通过对四极质谱计测量过程的理论分析，指出了用四极质谱计获得可靠的定量结果的条件及由此产生的分析方法和限制因素。重点分析了四极质谱计的稳定性、线性、灵敏度、分辨本领。同时指出了实现四极质谱计定量分析可能的努力方向。
In this paper,the measurement procedure with quadrupole mass spotrometer(QMS)has been discussed theoretically. The prerequisite for reliable quantitative results in gas analysis is decribed and resulting methods and their boundary conditions are presented.Attention is focused on the characteristic properties of QMS: stability,linearity,resolution and sensitivity.The recomman dations for quantitative results with QMS are made.
出处
《真空与低温》
1995年第3期125-129,共5页
Vacuum and Cryogenics
