Ti／Al多层金属薄膜AES深度剖析的目标因子分析

TARGET FACTOR ANALYSIS IN AES DEPTH PROFILING OF Ti/Al MULTIFILM

目标因子分析法（ＴＦＡ）是一种对多元系统进行统计分析的计算数学方法。结合这种方法对Ｔｉ／Ａｌ多层金属薄膜的俄歇电子谱（ＡＥＳ）深度剖析结果进行了仔细的分析，获得了Ｔｉ、Ａｌ、Ｏ、Ｓｉ各元素的化合状态的深度分布情况，并与Ｘ射线光电子谱（ＸＰＳ）分析结果相一致．

Target Factor Analysis(TFA)is kind of mathematical technique for solving multidi-mensional problems of a certain type. By means of the technique,AES depth profiles of Ti/Al multi-film has been thoroughly studied in this paper. Each chemical state of Ti,Al,O, Si elements in depth distribution is obtained,and they were consistent with XPS analysis results.