摘要
本文叙述了一台采用封闭离子源的四极质谱计，它具有很强的抑制真空系统本底和热灯丝反应物的能力，即使采用普通高真空系统，仍能满足超纯工业气体的痕量杂质分析的要求。
A trace gas analysis mass spectrometer is reported.It is composed of a qudrupole MS with a special ion source and sampling system.The ionization chamber of the ion source can be operated to linear pressure 6 Pa or unlinear pressure 100 Pa.The interference of the ground pressure in vacuum system and hot temperature filament can be negligible.Eventhrough MS work at 10-4Pa high vacuum system,the trace gas sensitivity still reaches to 1×10-6.This instrument can be used in industrial gas manufacture andintegrated circuit factories.
出处
《质谱学报》
EI
CAS
CSCD
1995年第1期24-28,共5页
Journal of Chinese Mass Spectrometry Society
关键词
质谱计
气体痕量分析
qudrupole mass spectrometer,trace gas analysis,enclosed ion source.
