二次离子质谱学的最新进展──第9届国际二次离子质谱学会议评述

The Latest Developments on SIMS A Review of the gth International Conference on SIMS

二次离子质谱学（ＳＩＭＳ）以其很高的灵敏度、很宽的动态范围和优良的深度分辨已逐步发展成为一种重要而有特色的表面分析手段。本文结合第９届国际二次离子质谱学会议（ＳＩＭＳ－ＩＸ）对ＳＩＭＳ的最新进展作一个简要评述，范围包括ＳＩＭＳ的各个方面：基础研究、仪器发展、定量分析、应用以及后电离技术等。

Secondary Ion Mass Spectrometry(SIMS)is becoming an unique and importabt surface analysis tool due to its high sensetevety,wide dynamic range and excellent depth resolution.Based on the gth International Conference on SIMS held in November 1993,some latest developments on SIMS are reviewed in this paper.The scope covers all aspects of SIMS:fundamentals,instrumentation,quantification,applications and related techniques.