激光三角位移计接收光功率与被测表面倾斜的关系及倾斜角测量

Dependence of the Received Light Power of a Laser Triangulation Displacement Sensor on the Testing Surface Inclination and the Inclination Angle Measurement

以激光在粗糙物体表面的散射理论为基础．详细讨论了被测表面倾斜与激光三角位移计接收光功率的关系，在此基础上提出了在测位移的同时测量该倾斜角的方法．给出了计算机模拟及实测的结果。

The testing surface inclination will result in the large measuring error in the displacement measurement using commercial laser triangulation sensors. In this paper,according to the theory of light scattering from rough surfaces, the relationship between the received light power of the laser triangulation sensor and the testing surface inclination is discussed in detail. A method which can be used to measure the inclination angle and the displacement of the testing surface at the same time is given. Depending on the measurement of the inclination angle the measuring error of the displacement can be corrected or minimized. A computer simulation and experimental results are presented.