微波激励CO_2激光器表面波放电特性的分析

An Analysis of Characteristics of Surface Wave Discharge in the CO_2 Laser of Microwave Excitation

提出一种放电结构和理论模型，对表面波发生器的表面波放电等离子体特性进行了分析。在给定的工作气压、注入微波功率及所吸收的外场功率情况下，利用这一理论可以求出放电管内电子密度、电子温度以及微波电场强度的绝对值和径向分布。分析表明，这种放电结构很适于ＣＯ２激光器高效率的微波激励。

Parameter calculations of a cylindrical plasma column sustained by a surfatronare presented. From the calculations the absolute values and radial profiles of electrondensity and electron temperature are gained with the giving gas pressure, wave frequencyand microwave power absorbed. An analysis shows that the surfatron can efficiently be usedto the CO2laser of mircowave excitation.