Al／Si_3N_4／TbFeCo／Si_3N_4磁光盘厚度定量计算方法

Quantitative Calculation Method of Thickness of a Al/Si_3N_4/TbFeCo/Si_3N_4 Magneto-optic Disk

研究用ＸＲＦ基本参数法计算磁光盘的厚度和组成，铝层厚度用ＡＩＫα线计算，两层氨化硅厚度都采用ＳｔＫα线计算确定，磁光记录层采用ＦｅＫα，ＣｏＫα和ＴｂＬα线来确定其厚度及组成。列出了膜厚方程，可由计算机很快解出，其结果与标准符合很好。

A fundamental parameter XRF method for the determination of thickness and composition of a magneto-optic disk was studied. The measured Al Kαlins was used to calculate Al layer, while both Si3N4 layers were measured by total Si Kα itensities to discriminate each Si3N4 layer. A fundamental parameter method was used for calculations of magneto-optic layers by Fe Kα, Co Kα and Tb Lα Lines. Equations can be evaluated readily by a computer. The result is in good agreement with the standard sample.