高效铜激光倍频及在光刻中的应用

High-efficiency Second-harmonic Generation of a Copper Vapor Laser in BBO and its Application in Photolithography

通过线聚焦将自滤波振荡行波放大后的铜激光在ＢＢＯ晶体中信频，当基频光功率为５．４Ｗ时，倍频效率达１４．４％。用钢激光倍频光进行接触式光刻，刻线分辨率优于１．０μｍ。

A second-harmonic of a copper vapor laser whichis output from an oscillatoramplifer system with a self-fliering unstable resonator is generated in BBO crystal by a line focus. The conversion efficiency reached 14. 4% at 5. 4 W fundamental power. A pattern of 1. 0 μm lines and spases is resolved by contact photolithography on 255. 3 urn line for the first time.