氮化硼薄膜的脉冲激光沉积

Pulsed Laser Deposition of Boron Nitride Films

用Ｑ开关ＹＡＧ激光器的１．０６μｍ的脉冲激光在硅及玻璃衬底上沉积了氮化硼薄膜。做了ＳＥＭ，ＸＲＤ，红外透射谱和紫外一可见透射谱等测试。确认为六方氮化硼（ｈ－ＢＮ）薄膜．并测出其禁带宽度、晶格常数等。

Thin films of BN have been depotted on silicon and glass substrates using a Q-switched YAG laser (λ=1. 06 μm) on the basis of XRD, IR and UV-visible transmission spectra and of investiSations by SEM, the films thus preP8red were identified as h-BN films. The optical band gap and lattice costunts were determined.