菲涅耳微透镜列阵衍射效率的测试

Measurement of Diffractive Efficiency for Fresnel Microlens Arrays

提出了一种测试菲涅耳微透镜列阵衍射效率的有效方法，采用Ｈｅ－Ｎｅ激光器作为测试光源，利用计算机辅助测试构成了一个衍射效率测试光路系统，对测试原理进行了分析，该方法具有简便易行的特点，适于测试具有微小单元尺寸、周期密排的二元微光学元件的衍射效率。

An efficient measurement method for diffractive efficiency of Fresnel microlens arrays is proposed.A He-Ne laser beam is used as light source of the measurement. The diffractive efficiency measuring system is computer aided.The principle of measurement is analyzed.This method has the features of simplicity and ease to realize.It is suitable for measuring the diffractive efficiency of binary micro-optical elements.