软X光激光用多层膜反射镜的制备与检测

The Fabrication and Test of Multilayer Mirrors for Soft X-ray Lasers

介绍在制备和检测软Ｘ光激光用多层膜反射镜中听做的研究工作。重点是制备过程，包括基板、镀膜设备、膜厚控制方法，以及经大量实验得出的镀膜工艺条件、给出了利用Ｘ光射线衍射仪所做的周期结构检测结果，以及利用激光等离子体作光源的精密反射率计所作的反射率测量结果。最后，对工作进展和存在的问题做了简略评述。

The fabrication and test of multilayer mirrors for soft X-ray lasers are reported.The substrates, coating machine, film thickness controlling methods, and conditions in deposition process are described. The periodic structure of the multilayers is evaluated by Xray diffraction, and using a reflectometer with a laser produced plasma source the reflectance of the multilayers is tested. These multilayer mirrors have been employed in double passing experiments of soft X-ray lasers.