静电探针法对等离子体参数的测定

Electrostatic Probe Used to Determine Plasma Parameters

静电探针(又称朗谬尔探针)是最早被用于等离子体的诊断工具,它是在等离子体密度和温度比较低的情况下测定等离子体参数的基本方法。文章利用等离子体环境地面模拟设备,采用静电探针的方法,对等离子参数进行测定。并给出了模拟环境的测量结果,分析运行气压及微波功率对等离子体密度的影响。最后通过均匀性及稳定性测试,证明该等离子体地面模拟设备可以满足比较均匀的等离子体环境。

The electrostatic probe (Langmuir probe) is the earliest tool in plasma diagnosis. It is the basic method of measuring plasma parameters in case of low pressure density and temperature. In this paper, some plasma parameters are measured by using the electrostatic probe in the plasma environment simulator. The measurement results in the simulated environment are presented, and the influences of the air pressure and the microwave power on plasma density are analyzed. The uniformity and stability tests show that we have achieved a uniform plasma environment in the plasma environment simulator.