石英晶体微量天平污染量测试准确性的试验验证

Calibration of Quartz Crystal Microbalance for Contaminated Quantity Measurement

文章通过对石英晶体微量天平的污染量测试原理的分析,及在真空环境下的材料放气负载试验,借助分子流和视角因子理论,利用物质量准确均分方法,实现了1×10-7g的标准物质量的有效传递,从而实现了一种石英晶体微量天平的污染量测试准确性的检验方法,为在真空热试验过程中污染量测试的准确性提供了保证。

The contaminated quantity measurement with quartz crystal microbalance, the material outgassing load test in the vacuum condition, the molecular fluid theory and the angle of view gene theory are discussed in this paper. Utilizing the substance mass average method to accomplish an efficient transfer of a standard substance mass of 1×10-7 g, a calibration is made of quartz crystal microbalance. With that, the contaminated quantity measurement can be accurately made in the vacuum thermal test.