摘要
介绍了一种由PZT(压电陶瓷)驱动的用于MEMS微装配的微夹持器的设计,计算了夹持器本体的放大倍数和刚度.并用ANSYS仿真验证了数学计算的准确性.采用了基于视觉的标定方法,标定了微夹持器刚度、张合量、夹持力以及夹持力和张合量的关系。实验表明:夹持器张合量达280μm,夹持力达0.1N,可精确操作200- 2000μm的微齿轮,实现了微行星齿轮减速器的装配。
A gripper driven by PZT（ Piezoelectric Trausition）ceramic for MEMS （Micro Electronic and Mechanical System） assembly is developed. The magnification and bending rigidity are calculated and the calculation results are validated by ANSTS emulator. Furthermore, the bending rigidity, opening distance, and gripping force are calirated by the method based on the micro-vision. The exeperiment indicates that the opening distance and the gripping force reach 280μm and 0.1N respectively. The desigh of micro-gripper is verified by gripping of gears with the diameter of 200/an 2000μm and the micro planetary reducer is asscmbled.
出处
《机械设计与研究》
CSCD
北大核心
2005年第4期30-32,36,共4页
Machine Design And Research
基金
国防基础科研基金资助项目(K1401060130)
