单晶硅的纳米硬度测试分析

Nano-hardness Test Analysis on Single-crystal Silicon

介绍了测量硬度的几种方法,分析了纳米压痕硬度测量的基本原理。用美国原位纳米力学测试系统中的TriboIndenter对单晶硅进行了试验研究。试验结果表明,由于尺寸效应纳米硬度值随着载荷的增大而逐渐减小,纳米级的压痕试验得到的单晶硅的硬度值要高于其他传统方法测得的宏观硬度值。

Some measurements for hardness test were introduced, and the principle of the nano-hardness test was analyzed. Some nano-hardness tests were carried out on single crystal silicon with the TrihoIndenter in the nano-scale mechanical property test system. The results show that the nano-hardness is gradually reduced with the increase of load due to the size effect. The hardness of single crystal silicon in nano-scale is higher than that in macro-scale by the conventional tests.