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X射线荧光法测试镀银铜线镀层厚度 被引量:6

Determination of Ag-coated Copper Wire Layer Thickness by X-Ray Fluorescence Method
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摘要 结合X射线荧光法厚度测定仪FISCHERSCOPERX-RAYXUL,介绍了X射线荧光法测定镀层厚度的基本原理及仪器流程结构,并应用该方法对不同镀银铜线进行了镀层厚度测试,结果表明该方法测试重复性好,精密度高。同时本方法同经典的称重法的比较结果显示,该方法准度高,结果准确可靠。 Function principle of determination coating thickness by X-Ray fluorescence method and instrument flow chart were introduced based on FISCHERSCOPE X-RAY XUL. And different Ag -coated copper wire coating thickness were measured through XRF method with FISCHERSCOPE X-RAY XUL. The tested results showed that XRF method could ensure satisfying repeatability and precision. In addition, accuracy comparison based on XRF method and weighing method for different samples proved that X-Ray fluorescence method could gain high accuracy in the course of determination of Ag coated copper wire layer thickness
作者 张瑾 马磊
出处 《现代科学仪器》 2005年第3期60-62,共3页 Modern Scientific Instruments
关键词 X射线荧光法 镀层厚度 测厚仪 镀银铜线 XRF method Coating thickness Thickness measurement instrument Ag-coated copper wire
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